Auto Focus Wafer Inspection Machine for Reliable Bare Wafer Inspection

In semiconductor manufacturing, small defects on bare wafers or frames can quickly turn into yield loss, rework, and unplanned downtime. An auto focus wafer inspection machine ensures consistent, repeatable bare wafer inspection by automatically optimising focus and image quality for each die and frame area. This helps process and QA teams maintain stable quality standards, especially in high-mix, high-volume environments.

The system is designed to tackle the real-world quality issues that often slip through traditional inspection:

• Wafer defects (top and bottom vision)

incomplete die, scratches, contamination, Au residue, and other surface irregularities.

• Wafer frame defects (top vision)

incomplete cuts, cut position shift, double cuts, scratches, no cut, contamination, cracks.

• Wafer frame defects (bottom vision)

over cuts, cutting line issues, dirty or contaminated frame areas.

By consolidating these inspections into one automated wafer inspection machine, manufacturers can reduce escapes, improve first-pass yield, and react faster to process drift.

 

Why Choose This Auto Focus Wafer Inspection Machine

This platform stands out by combining customisable, AI-ready vision inspection with intelligent material handling. Moreover, multiple camera options allow the vision system to be matched to different die sizes and thicknesses, while inspection settings can be fine-tuned for each product. Its architecture is designed for AI integration, enabling advanced defect detection, classification, and trend analysis to enhance the consistency of bare wafer inspection over time.

At the same time, a configurable xyzθ stage with a minimum-contact vacuum chuck positions wafers at the ideal angle and height, supports thin and sensitive wafers, and allows bottom vision inspection directly on the stage for better repeatability. This is complemented by a dual robot arm configuration with flexible end effector and mapping options, as well as multiple input/output cassette configurations for various wafer and frame sizes. Together, these features make this auto focus wafer inspection machine a robust and scalable choice for fabs and OSATs that need stable, high-quality bare wafer inspection.