Wafer Wire Bond Inspection Machine | WI300

Wafer Magazine

Top Vision Inspection

WI 300 Wafer Inspection Machine is designed to deliver utmost flexibility to support top vision inspection for fabricated components on wafer such as lens, LED & IC packages from 4” tiles to 6” wafer. With unique blend of flexibility and high performance, it makes an ideal inspection solution for automation industry.

Features

  • High-Resolution Camera
    • Selection from 5MP to 65MP mono/colour camera imaging technology
  • Wafer Die and Wire Bond Inspection
    • Cosmetic and Wire Bond Checking
  • Auto Alignment Function
    • 2D decoding and Position Recognize (PR) vision
  • Real-Time Wafer Map Display
    • All inspection information, such as mapping maps and defect region inspection results, is visualized for easy reading
  • Supports Common Wafer Map Output Formats
    • STIF Files
  • Minimum Defect Size
    • 5μm x 5μm
  • Confocal Displacement Sensor
    • For warpage detection and height compensation up to 2mm
  • Multiple Unit Inspection in a Single Grab

Fully Auto Wafer Inspection / WI300

Modules

  1. Input
    Wafer Magazine
  2. XY Stage
  3. Wire Bond Vision Inspection
  4. Output
    Wafer Magazine

Flowchart

Transfer of wafer ring to XY stage in an automatic wire bonding machine for semiconductor processing

Transfer of wafer ring from the upstream machine or wafer magazine to the XY stage.

2D wafer decoding and pattern recognition using vision system in automated wire bond machine

2D decoding and PR vision.

Wire bond inspection using advanced vision system in automatic wire bonding equipment

Wire bond vision inspection.

Automated transfer of wafer after wire bond inspection to downstream machine or output station

Transfer to the downstream machine or output after inspection is complete.

Wafer Ring (4 – 6 inches)

Wafer Ring Cassette
Wafer Ring with Mounted Wafer
Semiconductor wafer ring with die attached on UV tape
Wafer ring with protective blue dicing tape

PCBA Tiles

Square panel board under 3D automated optical inspection for surface defects
Rectangular panel board analyzed using 3D automated optical inspection system

Top Inspection

Glue Overflow in terms of Y

Glue Overflow in terms of X

Glue on Die

Die Missing

Die Chip

Die Crack

Die Scratches at Non-active Area

Die Scratches in PD Area

Foreign Material on PCB

Foreign Material on Die

Die Rotation

Die Misalignment

Wire Sweep

Missing Wire

Non-stick on Pad (NSOP)

Non-stick on Lead (NSOL)

Unbonded

Smash Bond

Bond Offset

Double Bond

Bond Tail

Broken Wire

Vision Specifications

Top Vision
Camera 65MP Area Scan (Color)
Accuracy +/-3.5μm
FOV (H x V) 14.9mm x 11.2mm
Magnification 2x
PR Vision
Camera 1.3MP Area Scan (Mono)
Accuracy +/-0.25mm
FOV (H x V) 150mm x 110mm

Machine Specifications

Products 4” – 6” wafer
Specifications Input: Tiles, Wafer, Wafer rings
Output: Tiles, Wafer, Wafer rings
UPH 10K (single grab), 20K (multiple grab)

(depending on user product)

Vision Inspection Wire Bond and Cosmetic
Footprint 1250mm (W) x 2400mm (L) x 2050mm (H)
Warranty 1 year limited excluding wear and tear parts